Design and Analysis of a Novel MEMS Touch Mode Convex Capacitive Pressure Sensor for Altimeter Applications

The wide applications of Touch Mode Capacitive Pressure Sensors (TMCPS) have led the researchers working more on its performances. TMCPS acceptance due to their linearity, sensitivity, and ability withstand pressure which make them suitable for harsh environments. This study proposes a novel convex shape substrate further improve response TMCPS. work provides detailed mathematical analytical modeling upholds proposed design. analysis is compared with simulation results from software MATLAB. simulated been those reported in existing literature. linear operation range sensor stretched lower side (88[Formula: see text]KPa–2[Formula: text]MPa) sensitivity improved 2.85 times touch mode, completely fits altimeter applications. also includes step-by-step process be followed during fabrication sensor. Sensor system characteristics such as nonlinearity, hysteresis temperature dependence are calculated this work. presented theory fully supports superior performance square diaphragm